Ученые из российского университета МЭИ объявили о создании нового источника излучения, предназначенного для применения в оборудовании EUV-литографии. В сравнении с существующими отечественными решениями он отличается повышенным КПД за счет добавления лития к гелиевому плазменному заряду.
Пока источник существует в виде экспериментального образца, но проведенные масштабные исследования доказали, что дополнение гелиевого плазменного разряда литием позволит создавать стационарные источники, востребованные в EUV-литографии.
В будущем разработанный в МЭИ источник обеспечит массовый выпуск чипов и однокристальных систем по более тонким технологическим процессам, что заметно снизит их размеры, а также повысит быстродействие и улучшит энергоэффективность.
На текущий момент создан прототип перспективной разработки и ведутся работы по созданию передовых российских литографов на основе данного источника излучения.
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